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Ultra magnetostriction execution and its control partapplication in fluid Dietmar Reinert, Emmanuelle Bruna and Eva Flasplera aBG-Institute for Occupational Safety and Health (BGIA), Alte Heerstrae 111, D-53757 Sankt Augustin, Germany Abstract：The ultra magnetostriction material is one kind of newfunction material， in the consult massive literature foundatio，introduced the ultra magnetostriction execution principle andclassified and its in the fluid control part applied research presentsituation， and has carried on the forecast to the ultramagnetostriction execution in the fluid machinery applicationprospect. Key word： Ultra magnetostriction Execution Fluid control part 0. Introduction The hydraulic servo performance mainly is decided to composes thissystem the valve, pumps with fluid and so on oil motor controls thepart the performance. Therefore enhances the fluid to control the partthe performance always is peoples diligently goal. The traditionalfluid control part mainly uses the electric motor, the electro-magnetachievement actuates the part. In recent years, along with some newfunction materials appearances, made large scale to enhance the fluidto control the part the performance possibly to become. The ultramagnetostriction material is one kind of new electricity (magnetism) -the mechanical energy transformation material, has under the roomtemperature should the variable lamda big, energy density high, thespeed of response is quick and so on the characteristic, overseas byapplies it to the servo valve, the proportion valve and miniaturepumps and so on in the fluid control part, and has made some progress.This article makes an introduction on this aspect situation. 1. Ultra magnetostriction execution 1.1 ultra magnetostriction materials [ 1 ] [ 2 ] The ultra magnetostriction material (Giant Magnetostrictive Material)does not have to the traditional magnetostriction material (Fe, Co, Niand so on), is Dr. Clark which refers to the American water surfaceweapon center to the beginning of the 70s first discovers in roomtemperature and under the low magnetic field has the very bigmagnetostriction coefficient three Yuan thin crude iron compound, thetypical material is TbxDy1-xFe2-y. The in the formula x expressedratio of the Tb/Dy, y represents ratio of the R/Fe, x generally is0.27 ~ 0.35, y is 0.1 ~ 0.05. This kind of three Yuan rare earth alloymaterial has realized the commercialized production, the typicalcommodity trademark is Terfenol-D (USS Edge Technologies Corporation)or Magmek86 (Swedens Feredyn AB Corporation), represents theingredient is Tb0.27Dy0.73Fe1.93. With the piezoelectricity material (PZT) and traditionalmagnetostriction material Ni, Co and so on compare, the ultramagnetostriction material has the unique performance: Is very bigunder the room temperature strain value (1,500 ~ 2000ppm), is nickel40 ~ 50 times, is piezoelectricity ceramics 5 ~ 8 times; The energydensity is high (14,000 ~ 25000J/m), is nickel 400 ~ 500 times, ispiezoelectricity ceramics 10 ~ 14 times; The mechanical and electricalcoupling coefficient is big; The speed of response is quick (achievesmu the s level); The output strength is big, may reach 220 ~ 880N. Because ultra magnetostriction material above fine performance, thusis in particular good in many domains in the execution centerapplication prospect. 1.2 ultra magnetostriction executions The ultra magnetostriction execution structure simple, moves big, theoutput strength strong, is easy to realize the microminiaturization,and may use the wireless control. The ultra magnetostriction executionmay divide into following three kind of types according to thestructure: 1.2.1 direct drives [ 3 ] This kind of ultra magnetostriction execution mainly uses the clavateultra magnetostriction alloy direct drive execution component, doesnot use the enlargement organization, its general structure like chart1 shows. Because the ultra magnetostriction material compressivestrength is bigger than its tensile strength by far, therefore usesthe precompression spring to cause it to work under the certainpressure. In the chart about two permanent magnets use for to providethe certain leaning magnetic field, causes the ultra magnetostrictionstick to work in the appropriate linear scope. This kind of ultramagnetostriction execution structure relatively simple, moves, theoutput strength in a big way is strong, mainly is applied in the watersound transducer, the new motor, the micro displacement controller andthe fluid valve. 1.2.2 displacements (strength) enlargement [ 2] The displacement (strength) the enlargement ultra magnetostrictionexecution may divide into the release lever according to the principleto enlarge the type and the hydraulic pressure enlargement type twokinds. The release lever enlarges the type ultra magnetostrictionexecution mainly to use the release lever organization to obtain abigger displacement or the strength output, but also may use two kindof types the ultra magnetostriction sticks, namely has another to havethe negative magnetostriction coefficient to obtain a better effect.Concrete principle like chart 2 shows. The hydraulic pressureenlargement type ultra magnetostriction execution has mainly appliedin the hydromechanics Pascals law. 1.2.3 thin films [ 4 ] At present, appeared a new research hot spot - thin film ultramagnetostriction micro execution development and the application in the ultra magnetostriction material application domain. Under isapplies more Thin Membrane Type ultra magnetostriction micro execution in theminiature fluid control part principle. This kind of execution mainly uses some traditional the semiconductorcraft, in non- magnetic substrate on, the undersurface separatelycovers has, the negative magnetostriction characteristic membranousmaterial, when sur- magnetic field change, the thin film can have thedistortion, thus the impetus substrate deflection and curving achievesthe actuation goal. Compares with the usual body magnetostrictionexecution, the thin film ultra magnetostriction micro execution costis lower, and because in the thin film two micro magnetisms elasticitymutually affects enable it to have some new functions, this has thevital significance regarding the ultra magnetostriction materialpractical application. 2. Ultra magnetostriction execution in fluid control system several pieceof applications example 2.1 fuels pour into the valve [ 5] A Sweden company uses in the fuel Terfenol-D to pour into the valve,and applied for the patent. Like chart 4, its principle is through thecontrol actuation coil electric current, actuates to have the negativemagnetostriction the stick, causes the pin valve to mention or to laydown. This kind of design, has omitted the mechanical part connection,may cause the fuel in to pour into in the process to realize, the highaccuracy fast flows the stepless control, optimized the combustionprocess, moreover for was also quicker, the more precise computercontrol fuel system even exchaust gas system has provided thepossibility. 2.2 Straight Moves types servo valves [ 6] The servo valve is one kind of converter signal realizes the currentcapacity or the pressure control switching device for the hydraulicpressure signal. The commonly used servo valve actuation part mainlyis an electro-magnet, attempts 5 pieces is Urai uses one kind of newservo valve which the ultra magnetostriction driver designs, itsprinciple is the electric current big 小使ultra magnetostrictionstick elongates through the control coil in or reduces, thus causesthe valve core to open a change, comes carries on the adjustment tothe current capacity or the pressure. The servo valve valve coredisplacement passable position transmitter has fed back to the controlsystem, causes the overall system to form the closed loop. Ultra magnetostriction Straight Moves type servo valve structure compact,precision high, the speed of response is quicker than theelectrohydraulic servo valve, its maximum output current capacityreaches 2 L/min, the frequency width may reach 650 Hz (-3db). 2.3 fluids actuations piston [ 3] After coil circular telegram, ultra magnetostriction stick elongation,thus impels the big piston motion, by the hydromechanics in Pascalslaw, the ultra magnetostriction stick elongated quantity is enlarged,the enlargement factor is equal to the big piston area and the valvepiston area ratio. Otherwise, if the ultra magnetostriction stickimpels the valve piston, then outputs the strength is enlarged. 2.4 thin films miniature pump [ 7 ] At present, to the micro pipeline, the micro valve, the microflowmeter, micro pumps and so on the part micro flow control systemresearch has become one of miniature mechanical and electrical systemresearch hot spots. But thin film ultra magnetostriction microexecution appearance, also has provided a new method for the microfluid part actuation. Miniature pumps the actuation has partially used the thin film ultramagnetostriction micro execution which the disc installs. When isvertical exerts a change to the disc surface the magnetic field, thecircle discoid ultra magnetostriction thin film on, under vibrates,when upwardly vibrates, pumps the entrance opens in, the liquid inflowpumps; When vibrates to under, pumps the exportation opens, the liquidwill flow out by the certain pressure pumps. Pumps outside current capacity passable adjustment magnetic fieldfrequency change, when outside the magnetic field change frequency is2KHz, pumps the output reaches 10 mu l/min, certainly, exteriormagnetic field frequency cannot too be high, otherwise because willdivulge the question to be able to cause the discharge pressure thedrop. This kind miniature pumps another merit is, may use the non- contacttype actuation, this causes the structure and the energy supplieswhich pumps changes simply. In addition, the ultra magnetostrictionexecution is also applied to the proportion slide-valve, in the smallsatellite propeller micro valve and the ink fast spray prints in thehead fluid control component and so on bubble injector. 3 concluding remark Ultra magnetostriction execution application to fluid control part,but enormous enhances their performance, this is because the ultramagnetostriction execution appliance has the corresponding speedquick, the output strength is big, bears the pollution and may underthe low magnetic field strength characteristic and so on movement. At present, the ultra magnetostriction material applied to the fluidcomponent development research work still is at the start stage, buttheir application has poured into the new vigor for the fluid controltechnology. As a rare earth resources great nation, we should holdthis opportunity, greets the high-tech the challenge. References [1]Brun and Reinert, 2004a Brun, E., Reinert, D., 2004a. Ergonomic design of user guides or: death in the engine plant. BIA-Report 8/2004, Hauptverband der gewerblichen Berufsgenossenschaften (HVBG), Sankt Augustin. [2]Brun and Reinert, 2004b E. Brun and D. Reinert, Innovative operating instructions, Focus on BGIA’s Work, Berufsgenossenschaftliches Institut fr Arbeitsschutz – BGIA, Sankt Augustin (2004). [3]European Committee for Standardization (CEN), 1991a European Committee for Standardization (CEN), 1991a. EN 292-1 Safety of machinery, Basic concepts, General principles for design: Part 1: basic terminology; methodology, Brussels. [4]European Committee for Standardization (CEN), 1991b European Committee for Standardization (CEN), 1991b. EN 292-2 Safety of machinery, Basic concepts, General principles for design: Part 2: technical principles and specifications, Brussels. [5]European Committee for Standardization (CEN), 2001 European Committee for Standardization (CEN), 2001. EN 62079 Preparation of instructions – structuring, content and presentation, Brussels. [6]Fuller and Sulsky, 1995 J.K. Fuller and L.M. Sulsky, An examination of consumer advisement warning information embedded within written instructions; implications for memory and behaviour, Ergonomics 38 (1995), pp. 2238–2249. [7]Ibielski, 1990 Erich Ibielski, Bedienungs-Anleitungen. Aufgabe auch fr Werber – mit Sonder-Etat, Marketing Journal 23 (1990), pp. 56–61. 超磁致伸縮執(zhí)行器及其在流體控制元件中的應(yīng)用 Dietmar Reinert, Emmanuelle Bruna and Eva Flasplera aBG-Institute for Occupational Safety and Health (BGIA), Alte Heerstrae 111, D-53757 Sankt Augustin, Germany 摘要：超磁致伸縮材料是一種新型的功能材料，在查閱大量文獻(xiàn)的基礎(chǔ)上，介紹了超磁致伸縮執(zhí)行器的原理和分類(lèi)及其在流體控制元件中的應(yīng)用研究現(xiàn)狀，并對(duì)超磁致伸縮執(zhí)行器在流體機(jī)械中的應(yīng)用前景進(jìn)行了展望。 關(guān)鍵詞: 超磁致伸縮 執(zhí)行器 流體控制元件 0.引言 液壓伺服系統(tǒng)的性能主要取決于組成該系統(tǒng)的閥、泵和液壓馬達(dá)等流體控制元件的性能。因此提高流體控制元件的性能一直是人們努力的目標(biāo)。傳統(tǒng)的流體控制元件主要采用電動(dòng)機(jī)、電磁鐵作為驅(qū)動(dòng)元件。近年來(lái)，隨著一些新型功能材料的出現(xiàn)，使大幅度提高流體控制元件的性能成為可能。超磁致伸縮材料就是一種新型的電（磁）─機(jī)械能轉(zhuǎn)換材料，具有在室溫下應(yīng)變量λ大，能量密度高，響應(yīng)速度快等特性，國(guó)外以將它應(yīng)用于伺服閥、比例閥和微型泵等流體控制元件中，并取得了一些進(jìn)展。本文就這方面情況做些介紹。 1.超磁致伸縮執(zhí)行器 1.1超磁致伸縮材料[1][2] 超磁致伸縮材料（Giant Magnetostrictive Material）有別于傳統(tǒng)的磁致伸縮材料（Fe、Co、Ni等），是指美國(guó)水面武器中心的Clark博士于70年代初首先發(fā)現(xiàn)的在室溫和低磁場(chǎng)下有很大的磁致伸縮系數(shù)的三元稀土鐵化合物，典型材料為T(mén)bxDy1-xFe2-y。式中x表示Tb/Dy之比，y代表R/Fe之比，x一般為0.27～0.35，y為0.1～0.05。這種三元稀土合金材料已實(shí)現(xiàn)商品化生產(chǎn)，典型商品牌號(hào)為T(mén)erfenol-D(美國(guó)的Edge Technologies公司)或Magmek86(瑞典的Feredyn AB公司)，代表成分為T(mén)b0.27Dy0.73Fe1.93。 與壓電材料（PZT）及傳統(tǒng)的磁致伸縮材料Ni、Co等相比，超磁致伸縮材料具有獨(dú)特的性能：在室溫下的應(yīng)變值很大（1500～2000ppm），是鎳的40～50倍，是壓電陶瓷的5～8倍；能量密度高（14000～25000J/m），是鎳的400～500倍，是壓電陶瓷的10～14倍；機(jī)電耦合系數(shù)大；響應(yīng)速度快（達(dá)到μs級(jí)）；輸出力大，可達(dá)220～880N。由于超磁致伸縮材料的上述優(yōu)良性能，因而在許多領(lǐng)域尤其是在執(zhí)行器中的應(yīng)用前景良好。 1.2超磁致伸縮執(zhí)行器 超磁致伸縮執(zhí)行器的結(jié)構(gòu)簡(jiǎn)單、位移大、輸出力強(qiáng)、易實(shí)現(xiàn)微型化、并可采用無(wú)線(xiàn)控制。超磁致伸縮執(zhí)行器按結(jié)構(gòu)可分為以下三種類(lèi)型： 1.2.1直接驅(qū)動(dòng)型[3] 這種超磁致伸縮執(zhí)行器主要采用棒狀超磁致伸縮合金直接驅(qū)動(dòng)執(zhí)行器件，不采用放大機(jī)構(gòu)，其一般結(jié)構(gòu)如圖1所示。由于超磁致伸縮材料的抗壓強(qiáng)度遠(yuǎn)遠(yuǎn)大于其抗拉強(qiáng)度，因此采用預(yù)壓彈簧使其在一定的壓力下工作。圖中上下兩塊永久磁鐵用來(lái)提供一定的偏磁場(chǎng)，使超磁致伸縮棒在合適的線(xiàn)性范圍內(nèi)工作。這種超磁致伸縮執(zhí)行器的結(jié)構(gòu)相對(duì)簡(jiǎn)單、位移大、輸出力強(qiáng)，主要被應(yīng)用于水聲換能器、新型馬達(dá)、微位移控制器和流體閥中。 1.2. 2位移（力）放大型[2] 位移（力）放大型超磁致伸縮執(zhí)行器根據(jù)原理可分為杠桿放大式和液壓放大式兩種。杠桿放大式超磁致伸縮執(zhí)行器主要采用杠桿機(jī)構(gòu)來(lái)得到較大的位移或力的輸出，還可以采用兩種類(lèi)型的超磁致伸縮棒，即一根具有正的另一根具有負(fù)的磁致伸縮系數(shù)來(lái)獲得更好的效果。具體原理如圖2所示。液壓放大式超磁致伸縮執(zhí)行器主要應(yīng)用了流體力學(xué)中的帕斯卡定律。 1.2.3薄膜型[4] 目前,在超磁致伸縮材料的應(yīng)用領(lǐng)域出現(xiàn)了一個(gè)新的研究熱點(diǎn)—薄膜型超磁致伸縮微執(zhí)行器的開(kāi)發(fā)與應(yīng)用。下面是在微型流體控制元件中應(yīng)用較多的薄膜式超磁致伸縮微執(zhí)行器的原理。 這類(lèi)執(zhí)行器主要采用一些傳統(tǒng)的半導(dǎo)體工藝,在非磁性基片的上、下表面分別鍍上具有正、負(fù)磁致伸縮特性的薄膜材料，當(dāng)外加磁場(chǎng)變化時(shí)，薄膜會(huì)產(chǎn)生變形，從而帶動(dòng)基片偏轉(zhuǎn)和彎曲以達(dá)到驅(qū)動(dòng)目的。 與通常的體磁致伸縮執(zhí)行器相比，薄膜型超磁致伸縮微執(zhí)行器成本較低，并且由于薄膜中的二微磁彈性相互作用又使其具有一些新的功能，這對(duì)于超磁致伸縮材料的實(shí)際應(yīng)用具有重要意義。 3. 超磁致伸縮執(zhí)行器在流體控制系統(tǒng)中的幾則應(yīng)用實(shí)例 2.1燃料注入閥[5] 瑞典一家公司將Terfenol-D用于燃料注入閥，并申請(qǐng)了專(zhuān)利。如圖4，它的原理是通過(guò)控制驅(qū)動(dòng)線(xiàn)圈的電流，來(lái)驅(qū)動(dòng)具有負(fù)磁致伸縮的棒，使得針閥提起或放下。這種設(shè)計(jì)，省去了機(jī)械部件的連接，可使燃料在注入過(guò)程中實(shí)現(xiàn)快速、高準(zhǔn)確度的流動(dòng)無(wú)級(jí)控制，優(yōu)化了燃燒過(guò)程，而且也為更快、更精確的計(jì)算機(jī)控制燃料系統(tǒng)甚至排氣系統(tǒng)提供了可能。 2.2直動(dòng)式伺服閥[6] 　　伺服閥是一種變電器信號(hào)為液壓信號(hào)以實(shí)現(xiàn)流量或壓力控制的轉(zhuǎn)換裝置。常用的伺服閥的驅(qū)動(dòng)部件主要是電磁鐵，圖5則是Urai采用超磁致伸縮驅(qū)動(dòng)器而設(shè)計(jì)的一種新型伺服閥，它的原理是通過(guò)控制線(xiàn)圈中電流的大小使超磁致伸縮棒伸長(zhǎng)或縮短，從而使閥心得開(kāi)度變化，來(lái)對(duì)流量或壓力進(jìn)行調(diào)節(jié)。伺服閥閥心的位移可通過(guò)位移傳感器反饋到控制系統(tǒng)，使整個(gè)系統(tǒng)形成閉環(huán)。 超磁致伸縮直動(dòng)式伺服閥的結(jié)構(gòu)緊湊，精度高，響應(yīng)速度比電液伺服閥快，其最大輸出流量達(dá)２L/min,頻寬可達(dá)６５０Hz(-3db)。 2.3流體驅(qū)動(dòng)活塞[3] 當(dāng)線(xiàn)圈通電后，超磁致伸縮棒伸長(zhǎng)，從而推動(dòng)大活塞運(yùn)動(dòng)，由流體力學(xué)中的帕斯卡定律，超磁致伸縮棒的伸長(zhǎng)量被放大，放大倍數(shù)等于大活塞面積與小活塞面積的比值。反之,如果超磁致伸縮棒推動(dòng)小活塞,那么輸出的力將被放大。 2.4薄膜型微型泵[7] 目前，對(duì)微管道、微閥、微流量計(jì)、微泵等元件的微流量控制系統(tǒng)的研究已成為微型機(jī)電系統(tǒng)研究的熱點(diǎn)之一。而薄膜型超磁致伸縮微執(zhí)行器的的出現(xiàn)，又為微流體元件的驅(qū)動(dòng)提供了一個(gè)新的方法。 微型泵的驅(qū)動(dòng)部分采用了圓盤(pán)裝的薄膜型超磁致伸縮微執(zhí)行器。當(dāng)垂直于圓盤(pán)表面施加一個(gè)變化的磁場(chǎng)時(shí)，圓盤(pán)狀超磁致伸縮薄膜將上、下振動(dòng)，當(dāng)向上振動(dòng)時(shí)，泵的入口打開(kāi)，液體流入泵內(nèi)；當(dāng)向下振動(dòng)時(shí)，泵的出口打開(kāi)，液體將以一定的壓力流出泵。 泵的流量可通過(guò)調(diào)整外磁場(chǎng)的頻率改變，當(dāng)外磁場(chǎng)變化頻率為2KHz時(shí)，泵的輸出達(dá)10μl/min,當(dāng)然，外部磁場(chǎng)的頻率不能太高，否則由于泄漏問(wèn)題將會(huì)導(dǎo)致輸出壓力的下降。 這種微型泵的另一優(yōu)點(diǎn)是，可以采用非接觸式驅(qū)動(dòng)，這使泵的結(jié)構(gòu)和能源供給變得簡(jiǎn)單。此外，超磁致伸縮執(zhí)行器還被應(yīng)用于比例滑閥，微小衛(wèi)星推進(jìn)器中的微閥門(mén)和墨水快速?lài)娚浯蛴☆^的液滴注入器等流體控制器件中。 3結(jié)束語(yǔ) 超磁致伸縮執(zhí)行器應(yīng)用于流體控制元件，可極大的提高它們的性能，這是因?yàn)槌胖律炜s執(zhí)行器具有相應(yīng)速度快，輸出力大，耐污染并可在低磁場(chǎng)強(qiáng)度下動(dòng)作等特性。 目前，超磁致伸縮材料應(yīng)用于流體器件的開(kāi)發(fā)研究工作尚處于起步階段，但它們的應(yīng)用已給流體控制技術(shù)注入了新的活力。作為一個(gè)稀土資源大國(guó)，我們應(yīng)抓住這個(gè)機(jī)遇，迎接高新技術(shù)的挑戰(zhàn)。 參考文獻(xiàn) [1]Brun and Reinert, 2004a Brun, E., Reinert, D., 2004a. Ergonomic design of user guides or: death in the engine plant. BIA-Report 8/2004, Hauptverband der gewerblichen Berufsgenossenschaften (HVBG), Sankt Augustin. [2]Brun and Reinert, 2004b E. Brun and D. Reinert, Innovative operating instructions, Focus on BGIA’s Work, Berufsgenossenschaftliches Institut fr Arbeitsschutz – BGIA, Sankt Augustin (2004). [3]European Committee for Standardization (CEN), 1991a European Committee for Standardization (CEN), 1991a. EN 292-1 Safety of machinery, Basic concepts, General principles for design: Part 1: basic terminology; methodology, Brussels. [4]European Committee for Standardization (CEN), 1991b European Committee for Standardization (CEN), 1991b. EN 292-2 Safety of machinery, Basic concepts, General principles for design: Part 2: technical principles and specifications, Brussels. [5]European Committee for Standardization (CEN), 2001 European Committee for Standardization (CEN), 2001. EN 62079 Preparation of instructions – structuring, content and presentation, Brussels. [6]Fuller and Sulsky, 1995 J.K. Fuller and L.M. Sulsky, An examination of consumer advisement warning information embedded within written instructions; implications for memory and behaviour, Ergonomics 38 (1995), pp. 2238–2249. [7]Ibielski, 1990 Erich Ibielski, Bedienungs-Anleitungen. Aufgabe auch fr Werber – mit Sonder-Etat, Marketing Journal 23 (1990), pp. 56–61.